Substrate Cleaning Processes and Their Influence on the Laser Resistance of Anti-Reflective Coatings

by Thomas Gischkat, Daniel Schachtler, Igor Stevanovic, Zoltan Balogh-Michels, Roelene Botha, Andreas Bächli, Marco Cucinelli, André Mocker, Martin Gutsche, Sven Günther, Philipp Alder, Bernd Eiermann
Published 2020-11-01