Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure

by Haiwang Li, Yanxin Zhai, Zhi Tao, Yingxuan Gui, Xiao Tan
Published 2019-08-01

Powder Filling and Sintering of 3D In-chip Solenoid Coils with High Aspect Ratio Structure

by Yujia Huang, Haiwang Li, Jiamian Sun, Yanxin Zhai, Hanqing Li, Tiantong Xu
Published 2020-03-01