Powder Filling and Sintering of 3D In-chip Solenoid Coils with High Aspect Ratio Structure

by Yujia Huang, Haiwang Li, Jiamian Sun, Yanxin Zhai, Hanqing Li, Tiantong Xu
Published 2020-03-01

Broadband Lumped-Element Parameter Extraction Method of Two-Port 3D MEMS In-Chip Solenoid Inductors Based on a Physics-Based Equivalent Circuit Model

by Jiamian Sun, Haiwang Li, Sifan Wu, Tiantong Xu, Hanqing Li, Hanxiao Wu, Shuangzhi Xia
Published 2020-09-01