Material Properties of Y2O3 , YF3 and YOF Coatings for Anti-Plasma Erosion Applications

by Tzu-Ken Lin, 林子根
Published 2018

Investigation of TFT-LCD SiNx Etching Using Enhanced Capacitive-Coupled High-Density Plasma

by Tzu-Ken Lin, 林子根

Preparation and Characterization of Sprayed-Yttrium Oxyfluoride Corrosion Protective Coating for Plasma Process Chambers

by Tzu-Ken Lin, Dong-Sing Wuu, Shih-Yung Huang, Wei-Kai Wang
Published 2018-10-01

Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF4/O2 Plasma Chambers Using Y2O3 and YF3 Protective Coatings

by Tzu-Ken Lin, Wei-Kai Wang, Shih-Yung Huang, Chi-Tsung Tasi, Dong-Sing Wuu
Published 2017-07-01