Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF4/O2 Plasma Chambers Using Y2O3 and YF3 Protective Coatings

by Tzu-Ken Lin, Wei-Kai Wang, Shih-Yung Huang, Chi-Tsung Tasi, Dong-Sing Wuu
Published 2017-07-01

Structural and Stress Properties of AlGaN Epilayers Grown on AlN-Nanopatterned Sapphire Templates by Hydride Vapor Phase Epitaxy

by Chi-Tsung Tasi, Wei-Kai Wang, Sin-Liang Ou, Shih-Yung Huang, Ray-Hua Horng, Dong-Sing Wuu
Published 2018-09-01

Reduction of Defects in AlGaN Grown on Nanoscale-Patterned Sapphire Substrates by Hydride Vapor Phase Epitaxy

by Chi-Tsung Tasi, Wei-Kai Wang, Tsung-Yen Tsai, Shih-Yung Huang, Ray-Hua Horng, Dong-Sing Wuu
Published 2017-05-01