Attachment of MEM piezoresistive silicon pressure sensor dies using different adhesives

by Jović Vesna B., Matić Milan J., Vukelić Branko M., Starčević Marko S., Smiljanić Milče M., Lamovec Jelena S., Vorkapić Miloš D.
Published 2011-01-01

Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt.% TMAX

by Smiljanić Milče M., Rađenović Branislav, Lazić Žarko, Radmilović-Rađenović Marija, Rašljić-Rafajilović Milena, Cvetanović-Zobenica Katarina, Milinković Evgenija, Filipović Ana
Published 2021-01-01