Fabrication of Sio2-based microcantilevers by anisotropic chemical etching of (100) single crystal Si

by Jović Vesna, Lamovec Jelena, Popović Mirjana, Lazić Žarko
Published 2007-01-01

Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt.% TMAX

by Smiljanić Milče M., Rađenović Branislav, Lazić Žarko, Radmilović-Rađenović Marija, Rašljić-Rafajilović Milena, Cvetanović-Zobenica Katarina, Milinković Evgenija, Filipović Ana
Published 2021-01-01