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Sirutkaitis, V.
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Sirutkaitis, V.
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Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant
by
Bachmann, J.
,
Baravykas, T.
,
Butkutė, A.
,
Jonušauskas, L.
,
Jurkšas, T.
,
Merkininkaitė, G.
,
Šakirzanovas, S.
,
Sirutkaitis
,
V
.
,
Stančikas, J.
,
Tičkūnas, T.
,
Vargalis, R.
Published 2022
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Related Subjects
3D laser microfabrication
3d laser microfabrication
Aspect ratio
Etch rates
Etching
Femtosecond lasers
Fused silica
Glass
Glass microprocessing
Inorganic-organic
Laser etching
Laser micro-fabrication
Laser-assisted
Micro processing
Micro-objects
Organic lasers
Potassium hydroxide
Reaction rates
Selective laser etching
glass microprocessing
selective laser etching
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