3D laser microfabrication 1 3d laser microfabrication Aspect ratio 1 Etch rates 1 Etching 1 Femtosecond lasers 1 Fused silica 1 Glass 1 Glass microprocessing 1 Inorganic-organic 1 Laser etching 1 Laser micro-fabrication 1 Laser-assisted 1 Micro processing 1 Micro-objects 1 Organic lasers 1 Potassium hydroxide 1 Reaction rates 1 Selective laser etching 1 glass microprocessing 1 selective laser etching 1