Local Structure Analysis on Si-Containing DLC Films Based on the Measurement of C <i>K</i>-Edge and Si <i>K</i>-Edge X-ray Absorption Spectra

by Kazuhiro Kanda, Shuto Suzuki, Masahito Niibe, Takayuki Hasegawa, Tsuneo Suzuki, Hedetoshi Saitoh
Published 2020-03-01

Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film

by Kazuhiro Kanda, Ryo Imai, Shotaro Tanaka, Shuto Suzuki, Masahito Niibe, Takayuki Hasegawa, Tsuneo Suzuki, Hiroki Akasaka
Published 2021-02-01

Resistance of Hydrogenated Titanium-Doped Diamond-Like Carbon Film to Hyperthermal Atomic Oxygen

by Kengo Kidena, Minami Endo, Hiroki Takamatsu, Masahito Niibe, Masahito Tagawa, Kumiko Yokota, Yuichi Furuyama, Keiji Komatsu, Hidetoshi Saitoh, Kazuhiro Kanda
Published 2015-10-01