Resistance of Hydrogenated Titanium-Doped Diamond-Like Carbon Film to Hyperthermal Atomic Oxygen

by Kengo Kidena, Minami Endo, Hiroki Takamatsu, Masahito Niibe, Masahito Tagawa, Kumiko Yokota, Yuichi Furuyama, Keiji Komatsu, Hidetoshi Saitoh, Kazuhiro Kanda
Published 2015-10-01