Van der Waals epitaxy of 2D h -AlN on TMDs by atomic layer deposition at 250 °c

by Chang, S.-J, Chien, C.-H, Chih, J.H, Hu, C., Huang, Y.-C, Lai, Y.-T, Lin, J.-M, Tang, Y.-T, Tsai, Y.-W, Wang, S.-Y
Published 2022