Growth of lithium hydride thin films from solutions: Towards solution atomic layer deposition of lithiated films

by Ivan Kundrata, Karol Fröhlich, Lubomír Vančo, Matej Mičušík, Julien Bachmann
Published 2019-07-01

Atomic layer deposition and properties of mixed Ta2O5 and ZrO2 films

by Kaupo Kukli, Marianna Kemell, Marko Vehkamäki, Mikko J. Heikkilä, Kenichiro Mizohata, Kristjan Kalam, Mikko Ritala, Markku Leskelä, Ivan Kundrata, Karol Fröhlich
Published 2017-02-01