Wafer-scale 3D integration of InGaAs image sensors with Si readout circuits

by Shaver, David C., Keast, Craig L., Wheeler, Bruce D., Hu, WeiLin, Bolkhovsky, Vladimir, Berger, Robert, Suntharalingam, Vyshnavi, Soares, Antonio M., Donnelly, Joseph P., Mahoney, Leonard J., Oakley, Douglas C., Chapman, David C., Knecht, Jeffrey M., Yost, Donna-Ruth W., Chen, Chang-Lee
Published 2010