Simulation and Nonlinearity Optimization of a High-Pressure Sensor

by Ting Li, Haiping Shang, Weibing Wang
Published 2020-08-01

Fabrication of SiC Sealing Cavity Structure for All-SiC Piezoresistive Pressure Sensor Applications

by Lihuan Zhao, Haiping Shang, Dahai Wang, Yang Liu, Baohua Tian, Weibing Wang
Published 2021-12-01

Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor

by Baohua Tian, Haiping Shang, Lihuan Zhao, Dahai Wang, Yang Liu, Weibing Wang
Published 2021-01-01

Wafer Bonding of SiC-AlN at Room Temperature for All-SiC Capacitive Pressure Sensor

by Fengwen Mu, Yang Xu, Seongbin Shin, Yinghui Wang, Hengyu Xu, Haiping Shang, Yechao Sun, Lei Yue, Tatsurou Tsuyuki, Tadatomo Suga, Weibing Wang, Dapeng Chen
Published 2019-09-01