Research Update: Inhomogeneous aluminium dopant distribution in magnetron sputtered ZnO:Al thin films and its influence on their electrical properties

by André Bikowski, Mythili Rengachari, Man Nie, Nelia Wanderka, Patrick Stender, Guido Schmitz, Klaus Ellmer
Published 2015-06-01

Optimizing the plasma oxidation of aluminum gate electrodes for ultrathin gate oxides in organic transistors

by Michael Geiger, Marion Hagel, Thomas Reindl, Jürgen Weis, R. Thomas Weitz, Helena Solodenko, Guido Schmitz, Ute Zschieschang, Hagen Klauk, Rachana Acharya
Published 2021-03-01