Energy-Dependent RBS Channelling Analysis of Epitaxial ZnO Layers Grown on ZnO by RF-Magnetron Sputtering

by Florian Wittkämper, André Bikowski, Klaus Ellmer, Konrad Gärtner, Elke Wendler
Published 2019-06-01

Electrical and Optical Properties of Amorphous SnO₂:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive...

by Rainald Mientus, Michael Weise, Stefan Seeger, Rene Heller, Klaus Ellmer
Published 2020-02-01

BiVO4 photoanodes for water splitting with high injection efficiency, deposited by reactive magnetron co-sputtering

by Haibo Gong, Norman Freudenberg, Man Nie, Roel van de Krol, Klaus Ellmer
Published 2016-04-01

Research Update: Inhomogeneous aluminium dopant distribution in magnetron sputtered ZnO:Al thin films and its influence on their electrical properties

by André Bikowski, Mythili Rengachari, Man Nie, Nelia Wanderka, Patrick Stender, Guido Schmitz, Klaus Ellmer
Published 2015-06-01