Plasma temperature Silicon 2 Air-pressure 1 Al2O3 growth rate 1 Al2o3 growth rate 1 Alumina 1 Aluminum 1 Aluminum oxide 1 Annealing 1 Atmospheric pressure 1 Atomic emission spectroscopy 1 Atomic layer deposition 1 Confinement effects 1 Cost effectiveness 1 Cost-effective methods 1 Current density 1 Dark current densities 1 Deposition temperatures 1 Effect of HF-dip 1 Enhancement effects 1 Germania-tin alloy 1 Germania-tin on insulator 1 Germanium 1 Germanium tins 1 Germanium-tin alloys 1 Germaniums (Ge) 1 Growth rate 1 Hafnium oxides 1 Hydrofluoric acid 1 Interface states 1