Lows-temperatures 2 Metallorganic chemical vapor deposition Temperature 2 Al composition 1 Carrier concentration 1 Channel layers 1 Channel materials 1 Chemical vapor deposited 1 Conformal deposition 1 Gallium compounds 1 Hall mobility 1 High al 1 High potential 1 Lattice mismatch 1 Layered films 1 Low-temperature deposition 1 MOCVD 1 MOSFETs 1 Metal-organic chemical vapour depositions 1 Metalorganics 1 Multi-layers 1 Organic chemicals 1 Organometallics 1 Secondary ion mass spectrometry 1 Secondary ion mass spectroscopy 1 Semiconductor doping 1 Si-doping 1 Structural and electrical properties 1 Substrates 1 Thin films 1