Lattice mismatch Substrates 3 Semiconductor alloys 2 Si-Ge alloys 2 Silicon 2 Silicon substrates 2 AP-MOVPE 1 Al composition 1 Alloying 1 Alloying effect 1 Atmospheric pressure 1 Atomically flat interfaces 1 Barium compounds 1 Carrier concentration 1 Charge transfer 1 Chemical vapor deposited 1 Density functional theory 1 Deposited materials 1 Device performance 1 Dilute-nitride 1 Dispersion (waves) 1 Elastic behavior 1 Elastic relaxation 1 Elastic-strains 1 Electron mobility 1 Electrons 1 Emergent property 1 Empirical model 1 Epilayers 1 Etching 1