Effect of Annealing Time Process on the pH Sensitivity of Spin-coated TiO2/ZnO Bilayer Film
This paper presents an investigation on titanium dioxide (TiO2) and zinc oxide (ZnO) bilayer film, which is used as sensing membrane for extended-gate field effect transistor (EGFET) for pH sensing application. TiO2/ZnO thin films were deposited using sol-gel spin coating method on indium tin oxide...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2015
|
| Subjects: | |
| Online Access: | View Fulltext in Publisher |