Effect of hydrofluoric acid (HF) concentration to pores size diameter of silicon membrane
This paper studies parameters which affect the pore size diameter of a silicon membrane. Electrochemical etching is performed in characterise the parameter involved in this process. The parameter has been studied is volume ratio of hydrofluoric acid (HF) and ethanol as an electrolyte aqueous for ele...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Online Access: | View Fulltext in Publisher |