Fabrication technique of a 3 dimensional SU8 mold on PMMA substrate
Silicon or glass was a common material for SU8 coating. However, these materials are hard and brittle, make it difficult for drilling and dicing. This paper reported the effect of grayscale and resolution based on the various length of time for Propylene Glycol Methyl Ether Acetate (PGMEA) developin...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Series: | IEICE ELECTRONICS EXPRESS
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| Online Access: | View Fulltext in Publisher |