The Effect of SiC Polytypes on the Heat Distribution Efficiency of a Phase Change Memory
The amorphous to crystalline transition of germanium-antimony-tellurium (GST) using three types of silicon carbide's structure as a heating element was investigated. Simulation was done using COMSOL Multiphysic 5.0 software with separate heater structure. Silicon carbide (SiC) has three types o...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
2018
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Online Access: | View Fulltext in Publisher |