A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor
For the first time, we investigate a self-oscillating control loop for a three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor for force sensing applications. This is an important step towards real-time measurements using such a sensor. The simulated results successfully demonstrated th...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2015-09-11.
|
| Subjects: | |
| Online Access: | Get fulltext |