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01348 am a22001813u 4500 |
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|a Rouabah, Hamza
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|a Park, Benjamin Y
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|a Zaouk, Rabih B
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|a Morgan, Hywel
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|a Madou, Marc J
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|a Green, Nicolas G
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|a Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8
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|c 2011-02-17.
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|z Get fulltext
|u https://eprints.soton.ac.uk/372426/1/J57_Rouabah_Park_Zaouk_Morgan_Madou_Green_J_Micromechanics_Microengineering_2011.pdf
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|a Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as the pumping force mechanism acts on the surface of the fluid rather than the bulk. This paper presents a novel 3D electrode structure designed to overcome this limitation. The electrodes are fabricated using carbon-MEMS technology based on the pyrolysis of the photo-patternable polymer SU-8. The novel ac-electro-osmosis micropump shows an increase in the flow velocity compared to planar electrodes.
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