Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8
Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as t...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2011-02-17.
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| Subjects: | |
| Online Access: | Get fulltext |