Telluroether and Selenoether complexes as single source reagents for low pressure chemical vapor deposition of crystalline Ga<sub>2</sub>Te<sub>3</sub> and Ga<sub>2</sub>Se<sub>3</sub> thin films
The neutral complexes [GaCl<sub>3</sub>(E<sup>n</sup>Bu2)] (E = Se or Te), [(GaCl<sub>3</sub>)<sub>2</sub>{<sup>n</sup>BuE(CH<sub>2</sub>)<sub>n</sub>E<sup>n</sup>Bu}] (E = Se, n = 2; E = Te, n = 3), and...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2013-03-18.
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| Subjects: | |
| Online Access: | Get fulltext |