Aerosol-assisted chemical vapor deposition of transparent conductive gallium-indium-oxide films
Aerosol assisted chemical vapor deposition (AACVD) reactions of GaMe3, InMe3, and 6 equiv of the donor functionalized alcohol, HOCH2CH2OMe, in toluene resulted in the deposition of colorless, transparent gallium-indium-oxide films at a range of temperatures (350-450 C). The gallium-indium-oxide film...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2011-03-21.
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| Subjects: | |
| Online Access: | Get fulltext |