Laser erasable implanted gratings for integrated silicon photonics
In this work we experimentally demonstrate laser erasable germanium implanted Bragg gratings in SOI. Bragg gratings are formed in a silicon waveguide by ion implantation induced amorphization, and are subsequently erased by a contained laser thermal treatment process. An extinction ratio up to 24dB...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2011-05-23.
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| Subjects: | |
| Online Access: | Get fulltext |