Fabrication of diffraction-encoded micro-particles using nano-imprint lithography
A nano-imprint lithography technique is described for fabrication of optically encoded microparticles (diffractive barcodes). The particles are fabricated from SU8 - a material which can be processed lithographically, and which can be used for attachment of molecular tags. The barcodes are identifie...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
2007-07.
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Subjects: | |
Online Access: | Get fulltext |