Accurate characterization of wafer bond toughness with the double cantilever specimen
The displacement-loaded double cantilever test, also referred to as the "Maszara test" and the "crack opening method" by the wafer bonding community, is a common technique used to evaluate the interface toughness or surface energy of direct wafer bonds. While the specimen is wide...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2008-01-01.
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| Subjects: | |
| Online Access: | Get fulltext |