Excimer laser inscribed submicron period relief gratings in INOx films and overlaid waveguides
Relief gratings of submicron periodicity are patterned in InOx thin oxide films using 248 nm interferometric excimer laser ablation. The ablation process is studied in terms of grating depth versus exposure conditions, using optical diffraction efficiency measurements. Real time monitoring of gratin...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2004.
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| Subjects: | |
| Online Access: | Get fulltext |