UV Sensor Based on Surface Acoustic Waves in ZnO/Fused Silica

UV Sensor Based on Surface Acoustic Waves in ZnO/Fused Silica

Zinc oxide (ZnO) thin films have been grown by radio frequency sputtering technique on fused silica substrates. Optical and morphological characteristics of as-grown ZnO samples were measured by various techniques; an X-ray diffraction spectrum showed that the films exhibited hexagonal wurtzite stru...

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Bibliographic Details
Main Authors:	Benetti, M. (Author), Buzzin, A. (Author), Caliendo, C. (Author), Cannatà, D. (Author), de Cesare, G. (Author), Grossi, F. (Author), Verona, E. (Author)
Format:	Article
Language:	English
Published:	MDPI 2023
Subjects:	Acoustic surface wave devices Acoustic waves acoustoelectric effect Electric potential Energy gap fused silica Fused silica Fused silica substrates Harsh environment II-VI semiconductors Incident light Light absorption Oxide films Oxide layer photoconductivity Photoconductivity Piezoelectricity Radio frequency sputtering SAW Scanning electron microscopy Sensor response sensors Sputtering Sputtering techniques Substrates Surface acoustic waves UV light UV sensor UV-light Wave propagation Zinc oxide Zinc oxide thin films Zinc sulfide ZnO
Online Access:	View Fulltext in Publisher View in Scopus

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