UV Sensor Based on Surface Acoustic Waves in ZnO/Fused Silica

UV Sensor Based on Surface Acoustic Waves in ZnO/Fused Silica

Zinc oxide (ZnO) thin films have been grown by radio frequency sputtering technique on fused silica substrates. Optical and morphological characteristics of as-grown ZnO samples were measured by various techniques; an X-ray diffraction spectrum showed that the films exhibited hexagonal wurtzite stru...

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Bibliographic Details
Main Authors: Benetti, M. (Author), Buzzin, A. (Author), Caliendo, C. (Author), Cannatà, D. (Author), de Cesare, G. (Author), Grossi, F. (Author), Verona, E. (Author)
Format: Article
Language:English
Published: MDPI 2023
Subjects:
Acoustic surface wave devices
Acoustic waves
acoustoelectric effect
Electric potential
Energy gap
fused silica
Fused silica
Fused silica substrates
Harsh environment
II-VI semiconductors
Incident light
Light absorption
Oxide films
Oxide layer
photoconductivity
Photoconductivity
Piezoelectricity
Radio frequency sputtering
SAW
Scanning electron microscopy
Sensor response
sensors
Sputtering
Sputtering techniques
Substrates
Surface acoustic waves
UV light
UV sensor
UV-light
Wave propagation
Zinc oxide
Zinc oxide thin films
Zinc sulfide
ZnO
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