Planar Optofluidic Integration of Ring Resonator and Microfluidic Channels
We report an optofluidic hybrid silicon‐polymer planar ring resonator with integrated microfluidic channels for efficient liquid delivery. The device features a planar architecture of intersecting liquid‐core waveguides and microfluidic channels. A low‐loss integration of microfluidic channels is ac...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |