Accurate Inner Profile Measurement of a High Aspect Ratio Aspheric Workpiece Using a Two-Probe Measuring System
This paper presents a novel method for inner profile measurement and geometric parameter evaluation, such as the radius of the bottom, steepness and straightness of the steep sidewall of a high aspect ratio aspheric workpiece, by utilizing a two-probe measuring system, which includes a lateral displ...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI
2022
|
Subjects: | |
Online Access: | View Fulltext in Publisher |