Evaluation on the egfet ph sensing performance of sol-gel spin coated titanium dioxide thin film
For this study, TiO2 thin film was fabricated using sol-gel spin coating method. The fabricated film was then applied as sensing membrane in an extended gate field effect transistor (EGFET) pH sensor system. The pH sensing performance of the sol-gel spin coated TiO2 were evaluated in terms of sensit...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penerbit UTM Press
2021
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| Series: | Jurnal Teknologi
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| Subjects: | |
| Online Access: | View Fulltext in Publisher View in Scopus |