Drying Temperature Dependence of Sol-gel Spin Coated Bilayer Composite ZnO/TiO2 Thin Films for Extended Gate Field Effect Transistor pH Sensor
This study presents an investigation on zinc oxide (ZnO) and titanium dioxide (TiO2) bilayer film applied as the sensing membrane for extended-gate field effect transistor (EGFET) for pH sensing application. The influences of the drying temperatures on the pH sensing capability of ZnO/TiO2 were inve...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Institute of Physics Publishing
2018
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Subjects: | |
Online Access: | View Fulltext in Publisher View in Scopus |