Laser-lithographically written micron-wide superconducting nanowire single-photon detectors

Laser-lithographically written micron-wide superconducting nanowire single-photon detectors

We demonstrate the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography. We show saturated internal detection efficiencies with wire widths ranging from 0.59 μm to 1.43 μm under illumination at 1550 nm. We demons...

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Bibliographic Details
Main Authors: Bartley, T.J (Author), Höpker, J.P (Author), Mirin, R.P (Author), Protte, M. (Author), Verma, V.B (Author), Woo Nam, S. (Author)
Format: Article
Language:English
Published: IOP Publishing Ltd 2022
Subjects:
1550 nm
Avalanche photodiodes
Detection efficiency
Efficiency
laser lithography
Laser lithography
Nanowires
optical lithography
Particle beams
Photolithography
Photons
Silicides
Silicon detectors
Silicon substrates
Single photon sensitivity
single-photon detectors
Single-photon detectors
Substrates
Superconducting detector
superconducting detectors
Superconducting nanowire single photon detectors
Tungsten silicide
Wire
Wire width
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