Towards a deeper understanding of temperature-dependent material removal of single-crystal AlN: An atomistic study
Temperature-dependent material attrition and subsurface lattice damage of single-crystal AlN at various scratching depths/forces are investigated at atomic level using molecular dynamics simulation. An ultimate removal precision of depth down to monolayer of AlN is achieved based on the present temp...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier Ltd
2023
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |