Spatial distribution of thermally induced residual stresses in HF-CVD diamond coatings on microstructured steel surfaces
The chemical vapour deposition (CVD) of mechanically stable diamond layers on steel remains a big challenge that is difficult to solve. As a prerequisite to prevent the undesired graphite formation during the diamond CVD process, we apply a 5 μm thick CVD titanium-nitride interlayer with boron dopin...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier Ltd
2023
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Subjects: | |
Online Access: | View Fulltext in Publisher |