Origin Of Growth Twins During Czochralski Growth Of Heavily Doped, Dislocation-Free Single Crystal Silicon

Low voltage power electronics are made from dislocation free silicon heavily doped with arsenic or antimony to provide low electrical resistivity. Attempts to grow crystals with decreased resistivity have led to a higher probability of twinning during growth, so that the crystal no longer possesses...

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Bibliographic Details
Main Author: Kearns, Joel K.
Other Authors: Diran Apelian, Advisor
Format: Others
Published: Digital WPI 2019
Subjects:
Online Access:https://digitalcommons.wpi.edu/etd-dissertations/514
https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=1513&context=etd-dissertations