Development and implementation of automated interferometric microscope for study of MEMS inertial sensors
Microelectromechanical systems (MEMS) are quickly becoming ubiquitous in commercial and military applications. As the use of such devices increases their reliability becomes of great importance. Although there has been significant research in the areas of MEMS errors, there is a lack of work regar...
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Digital WPI
2009
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| Online Access: | https://digitalcommons.wpi.edu/etd-dissertations/279 https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=1278&context=etd-dissertations |