Carbon nanosheets and carbon nanotubes by RF PECVD
A planar antenna RF plasma enhanced chemical vapor deposition apparatus was built for carbon nanostructure syntheses. When operated in inductive and capacitive plasma discharging modes, two carbon nanostructures, carbon nanotube (CNT) and carbon nanosheet (CNS), were synthesized, respectively.;A nan...
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| Format: | Others |
| Language: | English |
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W&M ScholarWorks
2006
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| Online Access: | https://scholarworks.wm.edu/etd/1539623509 https://scholarworks.wm.edu/cgi/viewcontent.cgi?article=3300&context=etd |