CAFM Studies of Epitaxial Lateral Overgrowth GaN Films

This thesis uses the techniques of atomic force microscopy (AFM) and conductiveAFM (CAFM) to study defect sites on GaN films. In particular, these defect sites demonstrate current leakage under reverse-bias conditions that are detrimental to device fabrication. Two growth techniques that were used t...

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Bibliographic Details
Main Author: Kasliwal, Vishal P.
Format: Others
Published: VCU Scholars Compass 2007
Subjects:
Online Access:http://scholarscompass.vcu.edu/etd/1412
http://scholarscompass.vcu.edu/cgi/viewcontent.cgi?article=2411&context=etd