Laser Copper Plasma X-Ray Source Debris Characterization
Laser copper plasma sources are a compact, economical means of producing high intensity x-rays at the correct wavelengths for x-ray lithography. Copper debris in the form of vapor, ions, dust, and high-speed particles is an unwanted byproduct of the laser copper plasma technique. Improved methods...
| Main Author: | |
|---|---|
| Format: | Others |
| Published: |
ScholarWorks @ UVM
2008
|
| Subjects: | |
| Online Access: | http://scholarworks.uvm.edu/graddis/115 http://scholarworks.uvm.edu/cgi/viewcontent.cgi?article=1114&context=graddis |