A PRECISION INSTRUMENT FOR RESEARCH INTO NANOLITHOGRAPHIC TECHNIQUES USING FIELD-EMITTED ELECTRON BEAMS
Nanomanufacturing is an active research area in academia and industry due to the ever-growing demands for precision surface modifications of thin films or substrates with nanoscale features. Conventional lithographic techniques face many challenges as they approach their fundamental limits. Conseque...
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| Format: | Others |
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UKnowledge
2008
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| Online Access: | http://uknowledge.uky.edu/gradschool_diss/675 http://uknowledge.uky.edu/cgi/viewcontent.cgi?article=1678&context=gradschool_diss |