A PRECISION INSTRUMENT FOR RESEARCH INTO NANOLITHOGRAPHIC TECHNIQUES USING FIELD-EMITTED ELECTRON BEAMS

A PRECISION INSTRUMENT FOR RESEARCH INTO NANOLITHOGRAPHIC TECHNIQUES USING FIELD-EMITTED ELECTRON BEAMS

Nanomanufacturing is an active research area in academia and industry due to the ever-growing demands for precision surface modifications of thin films or substrates with nanoscale features. Conventional lithographic techniques face many challenges as they approach their fundamental limits. Conseque...

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Bibliographic Details
Main Author: Hii, King-Fu
Format: Others
Published: UKnowledge 2008
Subjects:
Precision Instrument
Nanomachining
Nanolithography
Scanning Tunneling Microscope
Electron Field Emission
Engineering
Mechanical Engineering
Online Access:http://uknowledge.uky.edu/gradschool_diss/675
http://uknowledge.uky.edu/cgi/viewcontent.cgi?article=1678&context=gradschool_diss

Internet

http://uknowledge.uky.edu/gradschool_diss/675
http://uknowledge.uky.edu/cgi/viewcontent.cgi?article=1678&context=gradschool_diss

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