On improving estimation of root cause distribution of volume diagnosis

Identifying common root causes of systematic defects in a short time is crucial for yield improvement. Diagnosis driven yield analysis (DDYA) such as Root cause deconvolution (RCD) is a method to estimate root cause distribution by applying statistical analysis on volume diagnosis. By fixing identif...

Full description

Bibliographic Details
Main Author: Tian, Yue
Other Authors: Reddy, Sudhakar M.
Format: Others
Language:English
Published: University of Iowa 2018
Subjects:
Online Access:https://ir.uiowa.edu/etd/6653
https://ir.uiowa.edu/cgi/viewcontent.cgi?article=8152&context=etd