On improving estimation of root cause distribution of volume diagnosis
Identifying common root causes of systematic defects in a short time is crucial for yield improvement. Diagnosis driven yield analysis (DDYA) such as Root cause deconvolution (RCD) is a method to estimate root cause distribution by applying statistical analysis on volume diagnosis. By fixing identif...
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Format: | Others |
Language: | English |
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University of Iowa
2018
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Online Access: | https://ir.uiowa.edu/etd/6653 https://ir.uiowa.edu/cgi/viewcontent.cgi?article=8152&context=etd |